Contamination Standards

Absolute Contamination Standards

• Substrate Deposited Polystyrene Latex Spheres
• For use with Scanning Surface Inspection Systems (SSIS)

Edge Contamination Standards

• Edges of Substrate Deposited Polystyrene Latex Spheres
• For use with Edge Contamination Detection Systems

Reticle Contamination Standards

• Spheres deposited on photomasks / test plates
• For use with reticle and pellicle inspection systems

Silica Contamination Standards

• Substrate Deposited highly spherical Silica Spheres
• For use with Advanced Scanning Surface Inspection Systems (SSIS)