Back to Top

You are here

MX2012 - Geometry Gauge for 300 mm Si-Wafer

The MX2012 is an automatic wafer geometry gauge to measure stress on 300 mm Si-wafers during Production. E+H’s technology using congtactless capacitive sensors is applied.
Throughput is 60 wafers/ hour

Our website uses cookies. By continuing we assume your permission to deploy cookies, as detailed in our privacy policy.